Customized Three Phase Magnetron Sputtering Power Supply

The power supply is a 20/40kw output power current source, suitable for plasma surface treatment, plasma heating, plasma sintering, plasma body heat treatment, plasma body heat processing, plasma synthesis, chemical superfine purification, gas discharge light source, MHD power generation, superconducting magnetic field, plasma shielding, constant torque electric power drag and other industrial processing.  

● This power supply has strong programmable function, flexible control, stable work, reliable quality and considerable cost performance. It is the good choice for ion coating equipment.

● In addition, it has self-adaptive arc extinguishing and working dimming, programmable to adapt to various coating processes.

● Unattended, connected to the Internet of things, seamless high and low voltage programmable switching, programmable short-circuit current and other advantages.

● It has complete protection and display functions of under voltage, overvoltage, overload and overheat.

●  The feedback control system of the power supply has been improved and optimized, which can effectively suppress power frequency ripple and ensure high control stability precision.

●  Can mix and match the DC, Medium frequency, and Grid bias power supply according to the clients’requirements.

Product structure

Basic technical parameter

Input voltage: Three-phase 380V/50Hz AC

Input current: ≤100A

Input voltage error: ≤rating value±10％

Three phase supply voltage unbalance: ≤5％

Input overvoltage protection: ≥420V

Input undervoltage protection: ≤350A

Booting up overshoot current: ≤300A

Output constant mode: Constant current

Output voltage: ≤1KV

Output current: 0~40A(Adjustable）

Output ripple: ±1％

Output power: ≤40kW

Output overvoltage protection: ≥1.1kV

Output overcurrent protection: ≥44A

Output frequency: 80KHz

Output duty ratio: 50%

Internal temperature alarm threshold value: 65℃

Cooling method: Air cooling + Water cooling

Short circuit protection

Contact us for detailed specification

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